Compare Image Name Manufacturer Pricing(USD) Quantity Weight(Kg) Size(LxWxH) Part Status Type Series Mount Mounting Type Operating Temperature Packaging Size / Dimension Moisture Sensitivity Level (MSL) Frequency Height Seated (Max) RoHS Status Datasheet Package / Case Height Max Supply Current Pbfree Code Additional Feature Physical Dimension JESD-609 Code Terminal Finish Surface Mount Voltage - Supply Supply Voltage Frequency Stability Function Operating Frequency Output Current - Supply (Max) Fall Time-Max Rise Time-Max Symmetry-Max Base Resonator
SIT1602BI-13-30N-24.000000E SIT1602BI-13-30N-24.000000E SiTIME
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0 0x0x0 download XO (Standard) SiT1602B Surface Mount -40°C~85°C Strip 0.098Lx0.079W 2.50mmx2.00mm 1 (Unlimited) 24MHz 0.031 0.80mm ROHS3 Compliant /files/sitime-sit1602bc8333e10000000x-datasheets-8593.pdf 4-SMD, No Lead yes HCMOS OUTPUT ALSO AVAILABLE; TR 2.5mm x 2.0mm x 0.75mm e4 Nickel/Palladium/Gold (Ni/Pd/Au) YES 3V 3V ±50ppm 24MHz HCMOS, LVCMOS 4.5mA 2ns 2ns 55/45% MEMS
SIT1602BI-13-25N-40.000000D SIT1602BI-13-25N-40.000000D SiTIME
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0 0x0x0 download XO (Standard) SiT1602B Surface Mount -40°C~85°C Strip 0.098Lx0.079W 2.50mmx2.00mm 1 (Unlimited) 40MHz 0.031 0.80mm ROHS3 Compliant https://pdf.utmel.com/r/datasheets/sitime-sit1602bc8333e10000000x-datasheets-8593.pdf 4-SMD, No Lead yes HCMOS OUTPUT ALSO AVAILABLE; TR 2.5mm x 2.0mm x 0.75mm e4 Nickel/Palladium/Gold (Ni/Pd/Au) YES 2.5V 2.5V ±50ppm 40MHz HCMOS, LVCMOS 4.2mA 2ns 2ns 55/45% MEMS
SIT1602BI-23-18N-26.000000E SIT1602BI-23-18N-26.000000E SiTIME
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0 0x0x0 download XO (Standard) SiT1602B Surface Mount -40°C~85°C Strip 0.126Lx0.098W 3.20mmx2.50mm 1 (Unlimited) 26MHz 0.031 0.80mm ROHS3 Compliant https://pdf.utmel.com/r/datasheets/sitime-sit1602bc8333e10000000x-datasheets-8593.pdf 4-SMD, No Lead yes HCMOS OUTPUT ALSO AVAILABLE; TR 3.2mm x 2.5mm x 0.75mm e4 Nickel/Palladium/Gold (Ni/Pd/Au) YES 1.8V 1.8V ±50ppm 26MHz HCMOS, LVCMOS 4.1mA 2.5ns 2.5ns 55/45% MEMS
SIT1602BI-13-25S-65.000000D SIT1602BI-13-25S-65.000000D SiTIME
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0 0x0x0 download XO (Standard) SiT1602B Surface Mount -40°C~85°C Strip 0.098Lx0.079W 2.50mmx2.00mm 1 (Unlimited) 65MHz 0.031 0.80mm ROHS3 Compliant https://pdf.utmel.com/r/datasheets/sitime-sit1602bc8333e10000000x-datasheets-8593.pdf 4-SMD, No Lead yes STANDBY; ENABLE/DISABLE FUNCTION; HCMOS OUTPUT ALSO AVAILABLE; TR 2.5mm x 2.0mm x 0.75mm e4 Nickel/Palladium/Gold (Ni/Pd/Au) YES 2.5V 2.5V ±50ppm Standby (Power Down) 65MHz HCMOS, LVCMOS 4.2mA 2ns 2ns 55/45% MEMS
SIT8008AI-13-XXE-39.321600D SIT8008AI-13-XXE-39.321600D SiTIME
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0 0x0x0 download XO (Standard) SiT8008 Surface Mount -40°C~85°C Strip 0.098Lx0.079W 2.50mmx2.00mm 1 (Unlimited) 39.3216MHz 0.031 0.80mm ROHS3 Compliant https://pdf.utmel.com/r/datasheets/sitime-sit8008ai2333e33333333d-datasheets-6285.pdf 4-SMD, No Lead yes 2.5mm x 2.0mm x 0.75mm e4 Nickel/Palladium/Gold (Ni/Pd/Au) YES 2.25V~3.63V ±50ppm Enable/Disable 39.3216MHz HCMOS, LVCMOS 4.5mA 2ns 2ns 55/45% MEMS
SIT1602BI-13-33N-14.000000G SIT1602BI-13-33N-14.000000G SiTIME
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0 0x0x0 download XO (Standard) SiT1602B Surface Mount -40°C~85°C Strip 0.098Lx0.079W 2.50mmx2.00mm 1 (Unlimited) 14MHz 0.031 0.80mm ROHS3 Compliant https://pdf.utmel.com/r/datasheets/sitime-sit1602bc8333e10000000x-datasheets-8593.pdf 4-SMD, No Lead yes HCMOS OUTPUT ALSO AVAILABLE 2.5mm x 2.0mm x 0.75mm e4 Nickel/Palladium/Gold (Ni/Pd/Au) YES 3.3V 3.3V ±50ppm 14MHz HCMOS, LVCMOS 4.5mA 2ns 2ns 55/45% MEMS
SIT1602BI-13-30E-74.176000E SIT1602BI-13-30E-74.176000E SiTIME
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0 0x0x0 download XO (Standard) SiT1602B Surface Mount -40°C~85°C Strip 0.098Lx0.079W 2.50mmx2.00mm 1 (Unlimited) 74.176MHz 0.031 0.80mm ROHS3 Compliant https://pdf.utmel.com/r/datasheets/sitime-sit1602bc8333e10000000x-datasheets-8593.pdf 4-SMD, No Lead yes 2.5mm x 2.0mm x 0.75mm e4 Nickel/Palladium/Gold (Ni/Pd/Au) YES 3V 3V ±50ppm Enable/Disable 74.176MHz HCMOS, LVCMOS 4.5mA 2ns 2ns 55/45% MEMS
SIT1602BI-13-33E-66.000000G SIT1602BI-13-33E-66.000000G SiTIME
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0 0x0x0 download XO (Standard) SiT1602B Surface Mount -40°C~85°C Strip 0.098Lx0.079W 2.50mmx2.00mm 1 (Unlimited) 66MHz 0.031 0.80mm ROHS3 Compliant https://pdf.utmel.com/r/datasheets/sitime-sit1602bc8333e10000000x-datasheets-8593.pdf 4-SMD, No Lead yes 2.5mm x 2.0mm x 0.75mm e4 Nickel/Palladium/Gold (Ni/Pd/Au) YES 3.3V 3.3V ±50ppm Enable/Disable 66MHz HCMOS, LVCMOS 4.5mA 2ns 2ns 55/45% MEMS
SIT1602BI-13-18N-54.000000E SIT1602BI-13-18N-54.000000E SiTIME
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0 0x0x0 download XO (Standard) SiT1602B Surface Mount -40°C~85°C Strip 0.098Lx0.079W 2.50mmx2.00mm 1 (Unlimited) 54MHz 0.031 0.80mm ROHS3 Compliant https://pdf.utmel.com/r/datasheets/sitime-sit1602bc8333e10000000x-datasheets-8593.pdf 4-SMD, No Lead yes HCMOS OUTPUT ALSO AVAILABLE; TR 2.5mm x 2.0mm x 0.75mm e4 Nickel/Palladium/Gold (Ni/Pd/Au) YES 1.8V 1.8V ±50ppm 54MHz HCMOS, LVCMOS 4.1mA 2.5ns 2.5ns 55/45% MEMS
SIT1602BI-23-28E-35.840000E SIT1602BI-23-28E-35.840000E SiTIME
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0 0x0x0 download XO (Standard) SiT1602B Surface Mount -40°C~85°C Strip 0.126Lx0.098W 3.20mmx2.50mm 1 (Unlimited) 35.84MHz 0.031 0.80mm ROHS3 Compliant https://pdf.utmel.com/r/datasheets/sitime-sit1602bc8333e10000000x-datasheets-8593.pdf 4-SMD, No Lead yes 3.2mm x 2.5mm x 0.75mm e4 Nickel/Palladium/Gold (Ni/Pd/Au) YES 2.8V 2.8V ±50ppm Enable/Disable 35.84MHz HCMOS, LVCMOS 4.5mA 2ns 2ns 55/45% MEMS
SIT1602BI-13-18S-66.666660D SIT1602BI-13-18S-66.666660D SiTIME
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0 0x0x0 download XO (Standard) SiT1602B Surface Mount -40°C~85°C Strip 0.098Lx0.079W 2.50mmx2.00mm 1 (Unlimited) 66.66666MHz 0.031 0.80mm ROHS3 Compliant https://pdf.utmel.com/r/datasheets/sitime-sit1602bc8333e10000000x-datasheets-8593.pdf 4-SMD, No Lead yes STANDBY; ENABLE/DISABLE FUNCTION; HCMOS OUTPUT ALSO AVAILABLE; TR 2.5mm x 2.0mm x 0.75mm e4 Nickel/Palladium/Gold (Ni/Pd/Au) YES 1.8V 1.8V ±50ppm Standby (Power Down) 66.66666MHz HCMOS, LVCMOS 4.1mA 2.5ns 2.5ns 55/45% MEMS
SIT1602BI-13-18S-32.768000G SIT1602BI-13-18S-32.768000G SiTIME
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0 0x0x0 download XO (Standard) SiT1602B Surface Mount -40°C~85°C Strip 0.098Lx0.079W 2.50mmx2.00mm 1 (Unlimited) 32.768MHz 0.031 0.80mm ROHS3 Compliant https://pdf.utmel.com/r/datasheets/sitime-sit1602bc8333e10000000x-datasheets-8593.pdf 4-SMD, No Lead yes STANDBY; ENABLE/DISABLE FUNCTION; HCMOS OUTPUT ALSO AVAILABLE 2.5mm x 2.0mm x 0.75mm e4 Nickel/Palladium/Gold (Ni/Pd/Au) YES 1.8V 1.8V ±50ppm Standby (Power Down) 32.768MHz HCMOS, LVCMOS 4.1mA 2.5ns 2.5ns 55/45% MEMS
SIT1602BI-23-33N-33.330000E SIT1602BI-23-33N-33.330000E SiTIME
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0 0x0x0 download XO (Standard) SiT1602B Surface Mount -40°C~85°C Strip 0.126Lx0.098W 3.20mmx2.50mm 1 (Unlimited) 33.33MHz 0.031 0.80mm ROHS3 Compliant https://pdf.utmel.com/r/datasheets/sitime-sit1602bc8333e10000000x-datasheets-8593.pdf 4-SMD, No Lead yes HCMOS OUTPUT ALSO AVAILABLE; TR 3.2mm x 2.5mm x 0.75mm e4 Nickel/Palladium/Gold (Ni/Pd/Au) YES 3.3V 3.3V ±50ppm 33.33MHz HCMOS, LVCMOS 4.5mA 2ns 2ns 55/45% MEMS
SIT1602BI-13-25N-35.840000D SIT1602BI-13-25N-35.840000D SiTIME
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0 0x0x0 download XO (Standard) SiT1602B Surface Mount -40°C~85°C Strip 0.098Lx0.079W 2.50mmx2.00mm 1 (Unlimited) 35.84MHz 0.031 0.80mm ROHS3 Compliant https://pdf.utmel.com/r/datasheets/sitime-sit1602bc8333e10000000x-datasheets-8593.pdf 4-SMD, No Lead yes HCMOS OUTPUT ALSO AVAILABLE; TR 2.5mm x 2.0mm x 0.75mm e4 Nickel/Palladium/Gold (Ni/Pd/Au) YES 2.5V 2.5V ±50ppm 35.84MHz HCMOS, LVCMOS 4.2mA 2ns 2ns 55/45% MEMS
SIT1602BI-23-28N-66.000000E SIT1602BI-23-28N-66.000000E SiTIME
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0 0x0x0 download XO (Standard) SiT1602B Surface Mount -40°C~85°C Strip 0.126Lx0.098W 3.20mmx2.50mm 1 (Unlimited) 66MHz 0.031 0.80mm ROHS3 Compliant https://pdf.utmel.com/r/datasheets/sitime-sit1602bc8333e10000000x-datasheets-8593.pdf 4-SMD, No Lead yes HCMOS OUTPUT ALSO AVAILABLE; TR 3.2mm x 2.5mm x 0.75mm e4 Nickel/Palladium/Gold (Ni/Pd/Au) YES 2.8V 2.8V ±50ppm 66MHz HCMOS, LVCMOS 4.5mA 2ns 2ns 55/45% MEMS
SIT1602BI-13-33N-66.600000G SIT1602BI-13-33N-66.600000G SiTIME
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0 0x0x0 download XO (Standard) SiT1602B Surface Mount -40°C~85°C Strip 0.098Lx0.079W 2.50mmx2.00mm 1 (Unlimited) 66.6MHz 0.031 0.80mm ROHS3 Compliant https://pdf.utmel.com/r/datasheets/sitime-sit1602bc8333e10000000x-datasheets-8593.pdf 4-SMD, No Lead yes ALSO COMPATIBLE WITH HCMOS OUTPUT; TR 2.5mm x 2.0mm x 0.75mm e4 Nickel/Palladium/Gold (Ni/Pd/Au) YES 3.3V 3.3V ±50ppm 66.6MHz HCMOS, LVCMOS 4.5mA 2ns 2ns 55/45% MEMS
SIT1602BI-13-XXN-38.400000G SIT1602BI-13-XXN-38.400000G SiTIME
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0 0x0x0 download XO (Standard) SiT1602B Surface Mount -40°C~85°C Strip 0.098Lx0.079W 2.50mmx2.00mm 1 (Unlimited) 38.4MHz 0.031 0.80mm ROHS3 Compliant https://pdf.utmel.com/r/datasheets/sitime-sit1602bc8333e10000000x-datasheets-8593.pdf 4-SMD, No Lead yes HCMOS OUTPUT ALSO AVAILABLE 2.5mm x 2.0mm x 0.75mm e4 Nickel/Palladium/Gold (Ni/Pd/Au) YES 2.25V~3.63V ±50ppm 38.4MHz HCMOS, LVCMOS 4.5mA 2ns 2ns 55/45% MEMS
SIT1602BI-23-XXS-66.666000D SIT1602BI-23-XXS-66.666000D SiTIME
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0 0x0x0 download XO (Standard) SiT1602B Surface Mount -40°C~85°C Strip 0.126Lx0.098W 3.20mmx2.50mm 1 (Unlimited) 66.666MHz 0.031 0.80mm ROHS3 Compliant https://pdf.utmel.com/r/datasheets/sitime-sit1602bc8333e10000000x-datasheets-8593.pdf 4-SMD, No Lead yes STANDBY; ENABLE/DISABLE FUNCTION; HCMOS OUTPUT ALSO AVAILABLE; TR 3.2mm x 2.5mm x 0.75mm e4 Nickel/Palladium/Gold (Ni/Pd/Au) YES 2.25V~3.63V ±50ppm Standby (Power Down) 66.666MHz HCMOS, LVCMOS 4.5mA 2ns 2ns 55/45% MEMS
SIT1602BI-13-30E-62.500000E SIT1602BI-13-30E-62.500000E SiTIME
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0 0x0x0 download XO (Standard) SiT1602B Surface Mount -40°C~85°C Strip 0.098Lx0.079W 2.50mmx2.00mm 1 (Unlimited) 62.5MHz 0.031 0.80mm ROHS3 Compliant https://pdf.utmel.com/r/datasheets/sitime-sit1602bc8333e10000000x-datasheets-8593.pdf 4-SMD, No Lead yes 2.5mm x 2.0mm x 0.75mm e4 Nickel/Palladium/Gold (Ni/Pd/Au) YES 3V 3V ±50ppm Enable/Disable 62.5MHz HCMOS, LVCMOS 4.5mA 2ns 2ns 55/45% MEMS
SIT1602AI-23-33E-48.000000D SIT1602AI-23-33E-48.000000D SiTIME
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0 0x0x0 download XO (Standard) SiT1602 Surface Mount Surface Mount -40°C~85°C Strip 0.126Lx0.098W 3.20mmx2.50mm 1 (Unlimited) 48MHz 0.031 0.80mm ROHS3 Compliant https://pdf.utmel.com/r/datasheets/sitime-sit1602ai1333s19200000e-datasheets-6225.pdf 4-SMD, No Lead 812.8μm 3.2mm x 2.5mm x 0.75mm e4 Nickel/Palladium/Gold (Ni/Pd/Au) 3.3V 3.3V ±50ppm Enable/Disable 48MHz LVCMOS 4.5mA 2ns 2ns 55/45% MEMS
SIT1602BI-13-30N-66.660000E SIT1602BI-13-30N-66.660000E SiTIME
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0 0x0x0 download XO (Standard) SiT1602B Surface Mount -40°C~85°C Strip 0.098Lx0.079W 2.50mmx2.00mm 1 (Unlimited) 66.66MHz 0.031 0.80mm ROHS3 Compliant https://pdf.utmel.com/r/datasheets/sitime-sit1602bc8333e10000000x-datasheets-8593.pdf 4-SMD, No Lead yes HCMOS OUTPUT ALSO AVAILABLE; TR 2.5mm x 2.0mm x 0.75mm e4 Nickel/Palladium/Gold (Ni/Pd/Au) YES 3V 3V ±50ppm 66.66MHz HCMOS, LVCMOS 4.5mA 2ns 2ns 55/45% MEMS
SIT1602BI-13-28N-77.760000G SIT1602BI-13-28N-77.760000G SiTIME
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0 0x0x0 download XO (Standard) SiT1602B Surface Mount -40°C~85°C Strip 0.098Lx0.079W 2.50mmx2.00mm 1 (Unlimited) 77.76MHz 0.031 0.80mm ROHS3 Compliant https://pdf.utmel.com/r/datasheets/sitime-sit1602bc8333e10000000x-datasheets-8593.pdf 4-SMD, No Lead yes HCMOS OUTPUT ALSO AVAILABLE 2.5mm x 2.0mm x 0.75mm e4 Nickel/Palladium/Gold (Ni/Pd/Au) YES 2.8V 2.8V ±50ppm 77.76MHz HCMOS, LVCMOS 4.5mA 2ns 2ns 55/45% MEMS
SIT1602BI-13-33N-4.000000D SIT1602BI-13-33N-4.000000D SiTIME
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0 0x0x0 download XO (Standard) SiT1602B Surface Mount -40°C~85°C Strip 0.098Lx0.079W 2.50mmx2.00mm 1 (Unlimited) 4MHz 0.031 0.80mm ROHS3 Compliant https://pdf.utmel.com/r/datasheets/sitime-sit1602bc8333e10000000x-datasheets-8593.pdf 4-SMD, No Lead yes HCMOS OUTPUT ALSO AVAILABLE; TR 2.5mm x 2.0mm x 0.75mm e4 Nickel/Palladium/Gold (Ni/Pd/Au) YES 3.3V 3.3V ±50ppm 4MHz HCMOS, LVCMOS 4.5mA 2ns 2ns 55/45% MEMS
SIT1602AI-23-18E-33.33333 SIT1602AI-23-18E-33.33333 SiTIME
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0 0x0x0 download XO (Standard) SiT1602 Surface Mount Surface Mount -40°C~85°C Strip 0.126Lx0.098W 3.20mmx2.50mm 1 (Unlimited) 33.33333MHz 0.031 0.80mm ROHS3 Compliant /files/sitime-sit1602ai1333s19200000e-datasheets-6225.pdf 4-SMD, No Lead 787.4μm 3.9mA e4 Nickel/Palladium/Gold (Ni/Pd/Au) 1.8V ±50ppm Enable/Disable LVCMOS MEMS
SIT1602BI-23-28N-33.000000G SIT1602BI-23-28N-33.000000G SiTIME
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0 0x0x0 download XO (Standard) SiT1602B Surface Mount -40°C~85°C Strip 0.126Lx0.098W 3.20mmx2.50mm 1 (Unlimited) 33MHz 0.031 0.80mm ROHS3 Compliant https://pdf.utmel.com/r/datasheets/sitime-sit1602bc8333e10000000x-datasheets-8593.pdf 4-SMD, No Lead yes HCMOS OUTPUT ALSO AVAILABLE 3.2mm x 2.5mm x 0.75mm e4 Nickel/Palladium/Gold (Ni/Pd/Au) YES 2.8V 2.8V ±50ppm 33MHz HCMOS, LVCMOS 4.5mA 2ns 2ns 55/45% MEMS
SIT1602BI-23-25E-33.333330E SIT1602BI-23-25E-33.333330E SiTIME
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0 0x0x0 download XO (Standard) SiT1602B Surface Mount -40°C~85°C Strip 0.126Lx0.098W 3.20mmx2.50mm 1 (Unlimited) 33.33333MHz 0.031 0.80mm ROHS3 Compliant https://pdf.utmel.com/r/datasheets/sitime-sit1602bc8333e10000000x-datasheets-8593.pdf 4-SMD, No Lead yes 3.2mm x 2.5mm x 0.75mm e4 Nickel/Palladium/Gold (Ni/Pd/Au) YES 2.5V 2.5V ±50ppm Enable/Disable 33.33333MHz HCMOS, LVCMOS 4.2mA 2ns 2ns 55/45% MEMS
SIT1602BI-13-25S-3.570000G SIT1602BI-13-25S-3.570000G SiTIME
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0 0x0x0 download XO (Standard) SiT1602B Surface Mount -40°C~85°C Strip 0.098Lx0.079W 2.50mmx2.00mm 1 (Unlimited) 3.57MHz 0.031 0.80mm ROHS3 Compliant https://pdf.utmel.com/r/datasheets/sitime-sit1602bc8333e10000000x-datasheets-8593.pdf 4-SMD, No Lead yes STANDBY; ENABLE/DISABLE FUNCTION; ALSO COMPATIBLE WITH HCMOS OUTPUT; TR 2.5mm x 2.0mm x 0.75mm e4 Nickel/Palladium/Gold (Ni/Pd/Au) YES 2.5V 2.5V ±50ppm Standby (Power Down) 3.57MHz HCMOS, LVCMOS 4.2mA 2ns 2ns 55/45% MEMS
SIT1602BI-13-28S-4.096000G SIT1602BI-13-28S-4.096000G SiTIME
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0 0x0x0 download XO (Standard) SiT1602B Surface Mount -40°C~85°C Strip 0.098Lx0.079W 2.50mmx2.00mm 1 (Unlimited) 4.096MHz 0.031 0.80mm ROHS3 Compliant https://pdf.utmel.com/r/datasheets/sitime-sit1602bc8333e10000000x-datasheets-8593.pdf 4-SMD, No Lead yes STANDBY; ENABLE/DISABLE FUNCTION; HCMOS OUTPUT ALSO AVAILABLE 2.5mm x 2.0mm x 0.75mm e4 Nickel/Palladium/Gold (Ni/Pd/Au) YES 2.8V 2.8V ±50ppm Standby (Power Down) 4.096MHz HCMOS, LVCMOS 4.5mA 2ns 2ns 55/45% MEMS
SIT1602BI-13-25E-31.250000G SIT1602BI-13-25E-31.250000G SiTIME
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0 0x0x0 download XO (Standard) SiT1602B Surface Mount -40°C~85°C Strip 0.098Lx0.079W 2.50mmx2.00mm 1 (Unlimited) 31.25MHz 0.031 0.80mm ROHS3 Compliant https://pdf.utmel.com/r/datasheets/sitime-sit1602bc8333e10000000x-datasheets-8593.pdf 4-SMD, No Lead yes 2.5mm x 2.0mm x 0.75mm e4 Nickel/Palladium/Gold (Ni/Pd/Au) YES 2.5V 2.5V ±50ppm Enable/Disable 31.25MHz HCMOS, LVCMOS 4.2mA 2ns 2ns 55/45% MEMS
SIT1602BI-13-33N-27.000000E SIT1602BI-13-33N-27.000000E SiTIME
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0 0x0x0 download XO (Standard) SiT1602B Surface Mount -40°C~85°C Strip 0.098Lx0.079W 2.50mmx2.00mm 1 (Unlimited) 27MHz 0.031 0.80mm ROHS3 Compliant https://pdf.utmel.com/r/datasheets/sitime-sit1602bc8333e10000000x-datasheets-8593.pdf 4-SMD, No Lead yes HCMOS OUTPUT ALSO AVAILABLE; TR 2.5mm x 2.0mm x 0.75mm e4 Nickel/Palladium/Gold (Ni/Pd/Au) YES 3.3V 3.3V ±50ppm 27MHz HCMOS, LVCMOS 4.5mA 2ns 2ns 55/45% MEMS

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